On-site gas generation

High purity gases delivered by best in class energy saving production units
Electronics manufacturers can require very large flows of high purity nitrogen up to several 100,000 Nm³/hr and unwavering reliability in supply. Air Liquide provides on-site gas production units for argon, oxygen and hydrogen with best-in-class safety, reliability, flexibility and total cost of operation.

Benefits of an on-site gas production unit

On-site production enables very large flow-rates. As an alternative to supply by trucks from Air Liquide sites, an on-site gas production unit is environmentally friendly, reduces carbon footprint and saves transportation cost. Such production units can be located on the customer premises so called “on-site” or on Air Liquide premises with gases supplied through a pipeline directly to the customer Fab. Depending on the size, on-site units are working independently and can be remote controlled or operated by Air Liquide employees.

Combining this with a back-up solution, usually in the form of liquid gases stored in cryogenic tanks, the on-site unit assures a very high reliability and flexibility over the time.

Meeting higher flow-rate requirements with generators above 50,000 Nm³/h of nitrogen

Air Liquide has designed a range of standardized on-site gas production units that can be optimized for the production of nitrogen, oxygen and argon from air separation. Hydrogen can be produced from different raw hydrogenated sources (methanol, natural gas, water) and methods (electrolytic or catalytic).

Furthermore, Air Liquide continuously innovates in on-site generation to create better cost efficiency and to meet higher flow-rate requirements with generators 50,000 Nm³/h of nitrogen.

Air Liquide’s on-site gas production solutions

Thanks to its wide range and variety of on-site gas production units, Air Liquide offers the lowest-cost of ownership and ensures consistency, reliability, flexibility and purity.
Air Liquide’s on-site production solutions include:

  • Compact nitrogen on-site units (also called APSA) capable of producing up to 3,000 Nm³/hr with purity up to 0,1 ppm and pressure from 5 to 9 bar abs
  • Large nitrogen on-site units (also called TCNTM), suitable for flow ranges beyond 4,000 Nm³/hr, with purity of 99.99999% (less than 1 part of impurity per billion)
  • Oxygen on-site units (also called UPOX), which can either be integrated in TCNTM design or operate independently to generate ultra high purity liquid oxygen for flow range 120-600 Nm³/hr
  • Hydrogen on-site units with production ranging from 100 and 1000 Nm³/hr with purity of 99.999%